Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.13/931552

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Title
Nanopositioning system with force feedback for high-performance tracking and vibration control
Author/Creator
Fleming, Andrew J.
Institution
The University of Newcastle. Faculty of Engineering & Built Environment, School of Electrical Engineering and Computer Science
Description
In this study, the actuator load force of a nanopositioning stage is utilized as a feedback variable to achieve both tracking and damping. The transfer function from the applied actuator voltage to the measured load force exhibits a zero-pole ordering that greatly simplifies the design and implementation of a tracking and damping controller. Exceptional tracking and damping performance can be achieved with a simple integral controller. Other outstanding characteristics include guaranteed stability and insensitivity to changes in resonance frequency. Experimental results on a high-speed nanopositioner demonstrate an increase in the closed-loop bandwidth from 210 Hz (with an integral controller) to 2.07 kHz (with a force-feedback control). Gain margin is simultaneously improved from 5 dB to infinity.
Relation
IEEE-ASME Transactions on Mechatronics Vol. 15, Issue 3, p. 433-447
Publisher Link
http://dx.doi.org/10.1109/tmech.2009.2028422
Date
2010
Publisher
Institute of Electrical and Electronics Engineers
Keyword(s)
mechatronics;  piezoelectric transducers;  position control;  integral resonant control
Resource Type
journal article
Identifier
http://hdl.handle.net/1959.13/931552
Identifier
ISSN:1083-4435
Reviewed
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Subject
"IEEE-ASME Transactions on Mechatronics"
 
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